Effects of various passivation dielectrics and vis reservoir lengths on stress and electromigration reliability of metal interconnects

제목
Effects of various passivation dielectrics and vis reservoir lengths on stress and electromigration reliability of metal interconnects
저자
이원규
발행일
2001-11
학회명
MRS Proceedings
개최국가
미국
학회 개최일
2001-11 ~ 2001-11