Structural analysis of the reconstructed Si(001)-C surface

  • Park, JY
  • Seo, JH
  • Whang, CN
  • Kim, SS
  • Choi, DS
  • 외 1명
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초록

The atomic structure of reconstructed Si(001)c(434)-C surface has been studied by coaxial impact collision ion scattering spectroscopy. When the 100L of ethylene (C2H4) molecules have been exposed on Si(001)-(231) surface at 700 degrees C, it is found that C atoms cause the ordering of missing Si dimer defects and occupy the fourth layer of Si(001) directly below the bridge site. Our results provide the support for the previous model in which a missing dimer structure is accompanied by C incorporation into the subsurface. (c) 2005 American Institute of Physics.

키워드

ION-SCATTERING SPECTROSCOPYATOMIC-STRUCTURESI(100)GROWTH
제목
Structural analysis of the reconstructed Si(001)-C surface
저자
Park, JYSeo, JHWhang, CNKim, SSChoi, DSChae, KH
DOI
10.1063/1.1908452
발행일
2005-05-22
유형
Article
저널명
The Journal of Chemical Physics
122
20