Effects of post-growth atomic plasma exposure on crystalline grain growth in nanocrystalline silicon

  • 윤종환
제목
Effects of post-growth atomic plasma exposure on crystalline grain growth in nanocrystalline silicon
저자
윤종환
발행일
2006-08-22
학회명
13th International Symposium on the Physics of Semiconductors and Applications.
개최국가
대한민국
학회 개최일
2006-08-22 ~ 2006-08-22