상세 보기
The scaling of low-temperature ferroelectric Hf0.5Zr0.5O2 thin films using anhydrous H2O2
- 김시준;
- Yong Chan Jung;
- Jin-Hyun Kim;
- Jaidah Mohan;
- Heber Hernandez-Arriaga;
- 외 4명
- 제목
- The scaling of low-temperature ferroelectric Hf0.5Zr0.5O2 thin films using anhydrous H2O2
- 저자
- 김시준; Yong Chan Jung; Jin-Hyun Kim; Jaidah Mohan; Heber Hernandez-Arriaga; Su Min Hwang; Daniel Alvarez; Jeffrey Spiegelman; Jiyoung Kim
- 발행일
- 2022-02-27
- 학회명
- The Minerals, Metals & Materials Society (TMS) 2022
- 개최국가
- 미국
- 학회 개최일
- 2022-02-27 ~ 2022-03-03