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The influence of etching chamber seasoning on the variation of polysilicon etch rate
- 제목
- The influence of etching chamber seasoning on the variation of polysilicon etch rate
- 저자
- 이원규
- 발행일
- 2000-11-01
- 학회명
- The 10th Seoul International Symposium on the Physics of Semiconductors and Applications-2000
- 개최국가
- 대한민국
- 학회 개최일
- 2000-11-01 ~ 2000-11-01