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Effects of pulse modulations on particle growth in silane plasma reactor

  • 김교선; 
  • 김동주
제목
Effects of pulse modulations on particle growth in silane plasma reactor
저자
김교선; 김동주
발행일
2006-09-10
학회명
7th International Aerosol Conference
개최국가
미국
학회 개최일
2006-09-10 ~ 2006-09-10

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