Preparation of nanostructured TiO2 thin films by aerosol flame deposition process

초록

Titania thin films were prepared by using aerosol flame deposition process via the pyrolysis of titanium tetra-isopropoxide (TTIP) precursor. We analyzed the specific surface area, primary and secondary particle sizes, crystal structure, thin film morphology and thickness by BET method, electrophoretic light scattering, X-ray diffraction and scanning electron microscopy, respectively. The specific surface area of TiO2 particles deposited is over three-times larger than that of commercial Degussa P25. Crystallite structure of TiO2 particles can be controlled by changing the ratio of CH4/O-2 flow rates. We could prepare TiO2 thin films with single anatase phase by keeping the ratio of CH4/O-2 flow rates at 200 ml/min: 1,000 ml/min. As N-2 carrier gas flow rate to bubbler increases, the primary and secondary particle sizes increase, but decrease with increasing total N-2 gas flow rate through the central tube. The shorter the deposition height is, the smaller the deposition area is, but the thin film becomes thicker in the central region.

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