Different Behaviors of Catalytic Nanoparticles during Carbon Nanotube Growth by Chemical Vapor Deposition

초록

We report different behaviors of catalytic nanoparticles during thermal chemical vapor deposition (CVD) growth of single-walled carbon nanotubes (SWNTs). We used iron and cobalt nanoparticles (NPs) as catalysts and systematically investigated their structural and compositional evolution before and after the CVD process. In the case of iron NPs, we observed particle embedment into the substrates, which caused a decrease in the apparent height oil atomic force microscope measurements. The mean size of the Co NPs was also reduced due mainly to the evaporation, which was clearly measured by using X-ray photoelectron spectroscopy and secondary ion mass spectroscopy.

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