Optimal modified lateral shearing interferometer for submicro-defects measurement of transparent objects

초록

Transparent optical components, which are required for high-precision and high-performance, are made by a plastic injection molding method. This can cause inner defects to appear because of the difference in cooling rate and pressure. However, submicron inner defects, caused by the refractive index error, are extremely difficult to determine. Thus, digital holographic microscopy based on an optimal modified lateral shearing interferometer is proposed. This is to measure submicron defects in transparent objects, such as a defective microlens. In addition, the optimal lateral shearing distance is proposed to efficiently remove duplicate images. Optical experiments using the suggested lateral shearing interferometer are presented, and the experimental results with a test microlens confirm the feasibility of the proposed method. (C) 2017 Optical Society of America

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