상세 보기
Ex-situ grown low-temperature SiNx using hollow cathode plasma-enhanced atomic layer deposition with crystalline interfacial layer on AlGaN/GaN substrates
- 제목
- Ex-situ grown low-temperature SiNx using hollow cathode plasma-enhanced atomic layer deposition with crystalline interfacial layer on AlGaN/GaN substrates
- 저자
- 김시준
- 발행일
- 2019-11-18
- 학회명
- International Workshop on Dielectric Thin Films for Future Electron Devices: Science and Technology (IWDTF) 2019
- 개최국가
- 일본
- 학회 개최일
- 2019-11-18 ~ 2019-11-20