나노템플레이트 표면처리를 통한 나노패턴이 형성된 PDMS 탄성 스탬프 몰드 제작

초록

Polydimethylsiloxane (PDMS) is a widely used material for replicatingmicro-structures because of its transparency, deformability, and easy fabrication. At the nanoscale, however, it is hard to fill a nanohole template with uncuredPDMS. This paper introduces several simple methods by changing the surfaceenergy of a nanohole template and PDMS elastomer for replicating 100nm-scalestructures. In the case of template, pristine anodic aluminum oxide (AAO),hydrophobically treated AAO, and hydrophillically treated AAO are used. Forthe surface energy change of the PDMS elastomer, a hydrophilic additive anddilution solvent are added in the PDMS prepolymer. During the molding process,a simple casting method is used for all combinations of the treated template andmodified PDMS. The nanostructured PDMS surface was investigated with ascanning electron microscope after the molding process for verification.

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