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Modeling of the Evolutions of Negative Ions in Silane PCVD for Various Process Conditions

  • 김교선
제목
Modeling of the Evolutions of Negative Ions in Silane PCVD for Various Process Conditions
저자
김교선
발행일
1997-01
학회 개최일
1997-01 ~ 1997-01

ScholarWorks@강원대학교

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