The Vibration Control Performance of a Mechanical Adjustable Damping System for Micro-vibration Control of Ultra-precision Equipment

초록

The precision equipment for precision processing, manufacturing, and inspection process are usually managed in a strictly vibration-controlled environment that uses vibration isolators. To complement the weaknesses of these isolators, we designed and tested two types of mechanical adjustable dampers with helical gear: a box-like adjustable damper with a comb-type orifice and a round damper with a wing-type orifice. Additionally, we designed two versions for the latter: a standard version and an enhanced version to improve the variable performance. We then compared the performance of these two versions during their modal tests. Not surprisingly, the test showed that the enhanced version was superior to the standard version in variable damping. For this reason, we expect this damper to be particularly useful to semiconductor manufacturing facilities where the precision equipment are located.

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