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자료 필터
자료유형
발행연도
2013 ~ 2026
2013 2026
키워드
언어
전체 158건 중 51번부터 60번까지의 결과를 표시합니다.
2024
Conference
Comparative study on ferroelectric properties of (Hf,Zr)O2 thin films using H2O2 and O3 as ALD oxidants
- 김시준 ;
- 최예서 ;
- 박혜련 ;
- 박성빈 ;
- 강종묵 ;
- 외 4명
- 2024-01-24
- 대한민국
Article
BEOL Compatible Ultra-Low Operating Voltage (0.5 V) and Preconfigured Switching Polarization States in Effective 3 nm Ferroelectric HZO Capacitors
- Lee, Minjong ;
- Kim, Jinhyun ;
- Le, Dan N. ;
- Lee, Seojun ;
- Song, Siun ;
- ... Kim, Si Joon ;
- 외 8명
- 2024
- Digest of Technical Papers - Symposium on VLSI Technology
- Institute of Electrical and Electronics Engineers Inc.
2023
Conference
A study on the ferroelectric properties of hafnia-zirconia thin films at cryogenic temperatures
- 김시준 ;
- 이승빈 ;
- 민현홍 ;
- 최예서 ;
- 박혜련 ;
- 외 3명
- 2023-10-31
- 대한민국
Conference
In-situ reflectance absorption infra-red spectroscopy (RAIRS) study on ALD of HfO2 on TiN and Pt electrodes
- 김시준 ;
- 홍예은 ;
- 송시언 ;
- 최리노 ;
- Jiyoung Kim ;
- 외 3명
- 2023-10-08
- 스웨덴
Article
Toward Low-Thermal-Budget Hafnia-Based Ferroelectrics via Atomic Layer Deposition
- Kim, Jin-Hyun ;
- Onaya, Takashi ;
- Park, Hye Ryeon ;
- Jung, Yong Chan ;
- Le, Dan N. ;
- ... Kim, Si Joon ;
- 외 7명
- 2023-09-07
- ACS APPLIED ELECTRONIC MATERIALS
- AMER CHEMICAL SOC
Conference
High endurance of back-end-of-line compatible ferroelectric Hf0.5Zr0.5O2 thin films through low temperature annealing
- 김시준 ;
- 박혜련 ;
- 박성빈 ;
- 강종묵 ;
- Seojun Lee ;
- 외 2명
- 2023-08-02
- 미국
Conference
Enhanced ferroelectric polarization of Hf0.5Zr0.5O2 thin films through fast ramp-up annealing process
- 김시준 ;
- 박혜련 ;
- 박성빈 ;
- 강종묵 ;
- Seojun Lee ;
- 외 2명
- 2023-08-02
- 미국
Conference
The impact of oxygen source on the formation of TiN interface at the initial stage ALD process of hafnia-based ferroelectrics: an in-situ analysis
- 김시준 ;
- Jin-Hyun Kim ;
- Jiyoung Kim ;
- Yong Chan Jung ;
- Su Min Hwang ;
- 외 8명
- 2023-07-23
- 미국
Conference
Impact of oxygen source and cocktail precursor on ferroelectricity of ALD HfXZr1-XO2 thin films
- 김시준 ;
- Jin-Hyun Kim ;
- Yong Chan Jung ;
- Jiyoung Kim ;
- Minjong Lee ;
- 외 5명
- 2023-07-23
- 미국